COPRA LS1300x202-GRPE Linear Plasma Source

OverviewLS360x200-GRPELS500x500-DPRPELS670x203-GRPELS800x250-DPRPELS1100x202-GRPELS1300x202-GRPELS-custom design

The COPRA LS1300x202-GRPE Linear Plasma Source is designed for PVD-Assist and DLC coating processes as also fast substrate cleaning and activation processes on substrate widths up to 1200 mm. The COPRA LS1300x202-GRPE Linear Plasma Sources are solutions for batch PVD drum/tool coaters are state of the art Sputter Assist solutions with benchmarking post oxidation performances for high quality and productivity markets. The exceptional post oxidation properties are gaining increasing market interest for precision optical coating applications with high throughput requirements where magnetron sputtering solutions are gaining more and more market. These LS sources in a reactive sputter set up do also increase the densification of your film providing a better stoichiometry of it thus enabling high quality decorative coatings. The COPRA LS1300x202-GRPE Linear Plasma Sources are typically installed in mixed PVD/PECVD coater setups where you have movable substrates as i.e. vertical or horizontal batch/or inline coaters. 

Main Applications

1300x200 mm
neutral Plasma Beam (no filament)
Integrated Remote Match
1200 mm
CCR Flange
13,56 MHz
6 or 8 kW
5x10-4 to 1x10-2 mbar
7/16 or LC
2x flex tube 6 mm/2x flex tube 8 mm
Swagelok 6 mm
120 kg