COPRA LS800x250-DPRPE Linear Plasma Source

OverviewLS360x200-GRPELS500x500-DPRPELS670x203-GRPELS800x250-DPRPELS1100x202-GRPELS1300x202-GRPELS-custom design

The COPRA LS800x250-DPRPE Linear Plasma Source is designed for high performance PECVD applications with substrate widths of up to 700 mm. The gas cracking efficiency paired with the ability to steadily perform process appropriate levels of ion energy coupled with the adequate ion current density enable a variety of functional coatings on large areas. Forget the uniformity problems which typically occur with the use of RF technology for large area applications. The COPRA LS800x250-DPRPE Linear Plasma Source, the right choice for high throughput and quality metal oxide applications.

Main Applications

neutral Plasma Beam (no filament)
Integrated Remote Match
700 mm
CCR Flange
13,56 MHz
6 kW
5x10-4 to 1x10-1 mbar
7/16 or LC
2x flex tube 6 mm/2x flex tube 8 mm
VCR/Swagelok 6 mm
100 kg